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Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work.
Umfang: X, 138 S.
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Koch, F. 2017. X-ray optics made by X-ray lithography: Process optimization and quality control. Karlsruhe: KIT Scientific Publishing. DOI: https://doi.org/10.5445/KSP/1000070029
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Veröffentlicht am 16. Oktober 2017
Englisch
170
| Paperback | 978-3-7315-0679-9 |