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Ding Luo

High-speed surface profilometry based on an adaptive microscope with axial chromatic encoding

(Schriftenreihe Automatische Sichtprüfung und Bildauswertung ; 18)

AutorLuo, Ding

VerlagKIT Scientific Publishing, Karlsruhe

ISBN9783731510611

UmfangXXIII, 164 S.

Veröffentlicht
am:
25.02.2021

Erscheinungs-
jahr
2021

Verfügbarkeit04

Downloads:

Für Zitate bitte die folgende URL verwenden:
http://dx.doi.org/10.5445/KSP/1000125427

Abstract

An adaptive microscope with axial chromatic encoding is designed and developed, namely the AdaScope. With the ability to confocally address any locations within the measurement volume, the AdaScope provides the hardware foundation for a cascade measurement strategy to be developed, dramatically accelerating the speed of 3D confocal microscopy.