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Frieder Johannes Koch

X-ray optics made by X-ray lithography: Process optimization and quality control

(Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie ; 36)

AutorKoch, Frieder Johannes

VerlagKIT Scientific Publishing, Karlsruhe

ISBN9783731506799

UmfangX, 138 S.

Veröffentlicht
am:
16.10.2017

Erscheinungs-
jahr
2017

Verfügbarkeit04

Downloads:

Für Zitate bitte die folgende URL verwenden:
http://dx.doi.org/10.5445/KSP/1000070029

Abstract

Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work.